An Extended Stoney's Formula Including Nonlinear Deformation for Large Size Wafer of Multilayers with Arbitrary Thicknesses
Scripta Materialia（2020）
关键词
Layered structures,Residual strain,Wafer curvature,Fracture,GaN
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要