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Development of TiN Vacuum-Gap Capacitor Lumped-Element Kinetic Inductance Detectors

Faouzi Boussaha,Samir Beldi,Alessandro Monfardini,Jie Hu,Martino Calvo,Christine Chaumont,Florence Levy-Bertrand,Thibaut Vacelet,Alessandro Traini,Josiane Firminy,Michel Piat,Florent Reix

Journal of Low Temperature Physics（2019）

Cited 7|Views43
Key words
Kinetic inductance detector,Vacuum-gap capacitor,TiN electrodes
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