Very Large Scale Integration Optomechanics: a cure for loneliness of NEMS resonators?
2018 IEEE International Electron Devices Meeting (IEDM)（2018）
Key words
NEMS resonators,variable shape beam lithography,optomechanical devices,silicon microdisk resonators,single-particle mass spectrometry,optomechanical resonators,optomechanical sensors,very large scale integration process,optical quality factors,displacement resolution,very large scale integration optomechanics,liquid media,biosensing experiments
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