Plasma Oxidation Induced Ultra-Low Power Performance from A-Sinx:H Resistive Switching Memory

Dingwen Tan,Zhongyuan Ma,Xinxin Zhang,Xiaofan Jiang,Hui Zhang, Yang Sun,Wei Li,Ling Xu,Kunji Chen,Duan Feng

2018 14TH IEEE INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUIT TECHNOLOGY (ICSICT)（2018）

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Key words

plasma oxidation,high resistance states,low resistance states,resistive switching memory,ultralow power resistive switching performance,voltage 0.5 V,SiNx:H,Al-Si0.28N0.21O0.51:H-Si,Al-Si0.48N0.52:H-Si

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