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New Insights on SOI Tunnel FETs with Low-Temperature Process Flow for CoolCube™ Integration

C. Diaz Llorente,C. Le Royer,P. Batude,C. Fenouillet-Beranger,S. Martinie,C-M. V. Lu,F. Allain,J-P. Colinge,S. Cristoloveanu,G. Ghibaudo,M. Vinet

SOLID-STATE ELECTRONICS（2018）

Cited 9|Views66
Key words
Tunnel FET,TFET,SOI,Low temperature,SPER,Tunnelling,BTBT,3D integration
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