Ultra-Shallow Doping B, Mg, Ni, Cu, Mn, Cr and Fe into SiC with Very High Surface Concentrations Based on Plasma Stimulated Room-Temperature Diffusion

Ruixiang Hou,Lei Li,Xin Fang,Hui Zhao,Yihang Chen,Ziang Xie,Guosheng Sun,Xinhe Zhang,Yanfei Zhao,Rong Huang,Zengli Huang,Youqin He,Nongnong Ma,Jicai Zhang,Wanjing Xu,Jinbo Yang,Chijie Xiao,G. G. Qin

Journal of Materials Engineering and Performance（2019）

引用 5|浏览80

关键词

high surface concentrations,plasma doping without any external bias (PDWOEB),point defects,room-temperature (RT) diffusion,ultra-shallow doping depths

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