R&D Status of SOI-based Pixel Detector with 3D Stacking Readout

Toru Tsuboyama,Shun Ono,Miho Yamada,Yasuo Arai,Manabu Togawa,Ikuo Kurachi,Yoichi Ikegami,Kazuhiko Hara,Akimasa Ishikawa,Masayuki Ikebe,Makoto Motoyoshi

Nuclear instruments and methods in physics research Section A, Accelerators, spectrometers, detectors and associated equipment/Nuclear instruments & methods in physics research Section A, Accelerators, spectrometers, detectors and associated equipment（2019）

Cited 5|Views31

Key words

SOI CMOS pixel sensor,3D stacking

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