Strategy of Insertion of Merge Features in a Sea of Wires SADP Integration

James Hsueh-Chung Chen,Terry A. Spooner,Lawrence A. Clevenger,Martin O'Toole, Atsushi Ogino,Louis Lanzerotti, Sean Reidy,Craig Child

2018 IEEE International Interconnect Technology Conference (IITC)（2018）

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SADP/SAQP integration,spacer deposition,spacer cut lithography,block-lithography,FEOL/BEOL levels,power distribution,patterning techniques,sea of wires SADP integration

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