Selective Atomic Layer Deposition Mechanism for Titanium Dioxide Films with (etcp)ti(nme2)3: Ozone Versus WaterJoseph P. Klesko,Rezwanur Rahman,Aaron Dangerfield,Charith E. Nanayakkara,Thomas L'Esperance,Daniel F. Moser,L. Fabian Pena,Eric C. Mattson,Charles L. Dezelah,Ravindra K. Kanjolia,Yves J. ChabalChemistry of Materials（2018）引用 22|浏览20AI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
