The Use of AES and EELS for Complex Analysis of Two-Dimensional Coatings and Their Growth Process
Izvestiya Vysshikh Uchebnykh Zavedenii Materialy Elektronnoi Tekhniki = Materials of Electronics Engineering（2017）
关键词
PVD,AES,EELS,Two-dimensional coatings,Wetting nanophase layer,Sub-nanometer thickness,Quantitative Auger analysis,Plasmon satellite of Auger peak,Localization of places of adsorption,EELS depth profiling,Metal,Silicide,Silicon
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