Pulsed Bessel Beam-Induced High Aspect Ratio Microstructures on Diamond Substrate for Microfluidics and Biosensing Applications
2017 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC)（2017）
Key words
periodical submicron ripples,wide band gap,channel-like structures,micromachining,surface machining,photonics applications,damage free capability,femtosecond laser technology,biocompatibility,chemical resistance,good optical properties,high mechanical hardness,highest thermal conductivity,films,biosensing applications,microfluidics,diamond substrate,high aspect ratio microstructures,pulsed Bessel beam,laser irradiation,sample surface,laser microfabrication technology
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