Influence of Sputtering Pressure on the Nanostructure and the X-ray Reflectivity of Iridium Coatings

A. -C. Probst,M. Stollenwerk, F. Emmerich, A. Buettner, S. Zeising, J. Stadtmueller, F. Riethmueller,V. Stehlikova, M. Wen,L. Proserpio,C. Damm,B. Rellinghaus, T. Doehring

Surface and Coatings Technology（2017）

引用 14|浏览10

关键词

Iridium thin film,Radio-frequency magnetron sputtering,Nanostructure,Density,Surface micro -roughness,X-ray reflectivity

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