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Defect-free Isolation on High-Thermal-Conductivity SOI Substrates for Complementary BiCMOS Technology

K. Van Wichelen,P. Ong,A. Moussa,D. Radisic,K. Devriendt,S. Halder,K. Kenis,W. Lee,B. Vandevelde, C. Soonekindt, S. A. Hadi, T. Smet,S. Van Huylenbroeck,S. Decoutere,M. Seacrist,M. Ries, V. Drobny,R. Wise

Extended Abstracts of the 2009 International Conference on Solid State Devices and Materials（2009）

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