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Tungsten and Cobalt Metallization: A Material Study for MOL Local Interconnects

V. Kamineni,M. Raymond,S. Siddiqui, F. Mont,S. Tsai,C. Niu,A. Labonte,C. Labelle,S. Fan,B. Peethala,P. Adusumilli,R. Patlolla,D. Priyadarshini,Y. Mignot,A. Carr,S. Pancharatnam,J. Shearer,C. Surisetty,J. Arnold,D. Canaperi,B. Haran,H. Jagannathan

2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC)（2016）

引用 66|浏览78
关键词
Tungsten,Cobalt,MOL,local interconnects
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