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    • The Design and Characteristics of a 630-Mm Phase-Shifting Interferometer

    D. E. Silin,I. E. Kozhevatov,E. H. Kulikova,A. V. Pigasin, S. B. Speransky,S. A. Bel’kov,I. N. Derkach, D. I. Lobachev,I. E. Chernov

    Instruments and Experimental Techniques（2018）

    Federal Research Center

    Cited 14|Views27
    Abstract
    A large-aperture Fizeau interferometer has been developed for measuring the characteristics of optical elements with flat surfaces. The interferometer has two fields of view with dimensions of 630 and 100 mm and with transverse resolutions of 0.63 and 0.1 mm/pixel, respectively. Due to the calibration of the reference plates, the absolute measurement accuracy of the interferometer is λ/1000 RMS (λ = 632.8 nm) on a 630-mm field of view.
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