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Micrographs and Optical Properties of Al-Doped Zno Thin Films Deposited by Radio Frequency Magnetron Sputtering

Yuanyuan Li, Zhen Chen, Shuli Li, Xilong Li,Gengrong Chang,Junfeng Yan,Kewei Xu

FRONTIERS IN MICRO-NANO SCIENCE AND TECHNOLOGY（2014）

Cited 1|Views6
Key words
ZnO thin film,radio frequency magnetron sputtering,micrograph,optical property
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