SiC Epitaxy Growth Using Chloride-Based CVDAnne Henry,Stefano Leone,Franziska C. Beyer,Henrik Pedersen,Olof Kordina,Sven Andersson,Erik JanzenPhysica B Condensed Matter（2012）引用 20|浏览22关键词Silicon carbide,Chloride,Epitaxy,Doping,PL,DLTSAI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
