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Surface Morphology of Rf Plasma Immersion H+ Ion Implanted and Oxidized Si(100) Surface

M. Anastasescu,M. Stoica,M. Gartner,S. Bakalova,A. Szekeres,S. Alexandrova

18TH INTERNATIONAL SUMMER SCHOOL ON VACUUM, ELECTRON AND ION TECHNOLOGIES (VEIT2013)（2014）

Cited 3|Views8
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