Method to enable compressively strained pFET channel in a FinFET structure by implant and thermal diffusionN Berliner,Pranita Kulkarni,Nicolas Loubet,Kingsuk Maitra,Sanjay C Mehta,Paul A Ronsheim, Toyoji Yamamoto,Zhengmao Zhumag（2014）引用 30|浏览25AI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
