Roughening and Smoothing Behavior of Al/Zr Multilayers Grown on Flat and Saw-Tooth Substrates
ADVANCES IN X-RAY/EUV OPTICS AND COMPONENTS VI（2011）
Key words
diffraction grating,multilayer,wet anisotropic etch,EUV,soft x-rays,surface morphology,roughening,relaxation,Power Spectral Density
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined