WeChat Mini Program
Old Version Features

Subnanometer-Resolution Depth Profiling of Boron Atoms and Lattice Defects in Silicon Ultrashallow Junctions by Ion Beam Techniques

Lakshmanan H. Vanamurthy,Mengbing Huang,Hassaram Bakhru,Toshiharu Furukawa,Nathaniel Berliner, Joshua Herman, Zhengmao Zhu,Paul Ronsheim,Bruce Doris

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A（2013）

Cited 4|Views57
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined