Effect of Plasma N-2 and Thermal Nh3 Nitridation in Hfo2 for Ultrathin Equivalent Oxide ThicknessMin Dai, Yanfeng Wang,Joseph Shepard,Jinping Liu,Maryjane Brodsky,Shahab Siddiqui,Paul Ronsheim,Dimitris P. Ioannou,Chandra Reddy,William Henson,Siddarth Krishnan,Vijay Narayanan,Michael P. ChudzikJOURNAL OF APPLIED PHYSICS（2013）引用 27|浏览40AI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
