Controlling Line-Edge Roughness and Reactive Ion Etch Lag in Sub-150 Nm Features in Borophosphosilicate GlassParijat Bhatnagar,Siddhartha Panda,Nikki L. Edleman,Scott D. Allen,Richard Wise,Arpan MahorowalaJOURNAL OF APPLIED PHYSICS（2007）引用 8|浏览22AI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
