Langmuir probe and optical diagnostics of active screen N 2 –H 2 plasma nitriding processes with admixture of CH 4
Surface and Coatings Technology（2013）
关键词
5270 plasma diagnostics techniques and instrumentation,5275 plasma devices and applications,5225 plasma properties
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要