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Origins of Flash Lamp Annealing Induced P–n Junction Leakages in a 45 Nm P-Mosfet with Strained SiGe Source/drain

C. Y. Cheng,Y. K. Fang,J. C. Hsieh,H. Hsia,S. S. Lin,C. S. Hou,K. C. Ku,Y. M. Sheu

Journal of physics D, Applied physics（2009）

Cited 2|Views19
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