Millimeter Wave Technique for Non-Destructive Si Wafer Homogeneity Characterization
Physics and Engineering of Microwaves, Millimeter and Submillimeter Waves（2010）
Key words
electrical conductivity,elemental semiconductors,millimetre waves,nondestructive testing,permittivity,silicon,Si,homogeneity measurement,millimeter wave technique,resistivity distribution,space resolution
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined