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Highly Reliable Vertical NAND Technology with Biconcave Shaped Storage Layer and Leakage Controllable Offset Structure

Won-seok Cho,Sun Il Shim,Jaehoon Jang,Hoo-sung Cho, Byoung-Koan You,Byoung-Keun Son,Ki-hyun Kim,Jae-Joo Shim,Choul-min Park,Jin-soo Lim, Kyoung-Hoon Kim,De-will Chung, Ju-Young Lim,Hui-Chang Moon,Sung-min Hwang,Hyun-seok Lim,Han-Soo Kim,Jungdal Choi,Chilhee Chung

2010 SYMPOSIUM ON VLSI TECHNOLOGY, DIGEST OF TECHNICAL PAPERS（2010）

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Key words
Flash memory,Vertical,3D,TCAT and CTF
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