Design, Fabrication and Testing of a Micromachined Seismometer with NANO-G Resolution
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference（2009）
关键词
accelerometers,capacitive sensors,micromachining,micromechanical devices,seismometers,Earth's ambient seismicity,acceleration resolution,electromagnetic feedback control,high resolution microseismometer,high-quality- factor suspension,low-resonant-frequency,nano-G resolution,noise,sensitive lateral capacitive transducer,Micromachining,accelerometer,noise,seismometer
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