Nano-pore Arrays of Anodic Aluminum Oxide Fabricated Using a Cr Mask
2007 Digest of papers Microprocesses and Nanotechnology（2007）
Key words
aluminium compounds,anodisation,electron beam lithography,nanolithography,nanoporous materials,Al thin film,AlO-Cr-SiO2,Cr mask,anodic aluminum oxide,anodic voltage,anodizing process,electron beam lithography,ion milling,nanopore arrays
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