Wafer Bonding for Planar Double Gate Technology
Niagara Falls, NY（2006）
Key words
field effect transistors,high-k dielectric thin films,silicon compounds,silicon-on-insulator,wafer bonding,Freescale Semiconductor,MEMC collaboration,SOI wafers,SiON,bottom gate structures,high-K/metal gates,planar double gate technology,single crystalline silicon channel layer,wafer bonding
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