Solid-immersion Micromirror with Enhanced Angular Deflection for Silicon-Based Planar Lightwave Circuits
IEEE/LEOS Optical MEMs 2005 International Conference on Optical MEMs and Their Applications（2005）
关键词
MEMS,on-chip micromirror,planar lightwave circuits,rotary comb-drive,SIM,solid-immersion micromirror
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