Waveguide Hot Electron Bolometer Mixer Development for Upgreat
2014 39th International Conference on Infrared, Millimeter, and Terahertz waves (IRMMW-THz)（2014）
Key words
bolometers,focal planes,machining,microfabrication,niobium compounds,planar waveguides,superconducting microbridges,superconducting mixers,terahertz wave devices,NbN,NbN microbridges,RF planar circuit design,Si,focal plane array extension upGREAT,frequency 4.7 THz,high frequency channel,machining technology,microfabrication,size 2 mum,thin silicon membrane substrates,waveguide hot electron bolometer mixer
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