A nanowire gauge factor extraction method for material comparison and in-line monitoring
Micro Electro Mechanical Systems（2015）
关键词
gauges,micromechanical resonators,nanosensors,nanowires,nondestructive testing,piezoelectric materials,silicon,gf,nw,crystalline structures,destructive conventional techniques,doping levels,in-line monitoring,material comparison,monocrystalline devices,nanowire gauge factor extraction method,nondestructive extraction method,piezoresistive material properties,polysilicon nems,silicon-based nems resonators,wafer level,stress,nanoelectromechanical systems,doping,strain
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