Spark Protection Layers for Cmos Pixel Anode Chips in Mpgds

Y. Bilevych,V. M. Blanco Carballo,M. Chefdeville,P. Colas,E. Delagnes,M. Fransen,H. van der Graaf,W. J. C. Koppert,J. Melai,C. Salm,J. Schmitz,J. Timmermans,N. Wyrsch

Nuclear instruments and methods in physics research Section A, Accelerators, spectrometers, detectors and associated equipment/Nuclear instruments & methods in physics research Section A, Accelerators, spectrometers, detectors and associated equipment（2011）

Cited 32|Views49

Key words

MPGD,Micromegas,Pixel readout,Amorphous silicon,Silicon nitride,Timepix,CMOS post-processing,Microsystems,Above IC,Radiation detectors,Discharges,Sparks

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