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Fabrication of Lithographically Defined Optical Coupling Facets for Silicon-on-insulator Waveguides by Inductively Coupled Plasma Etching

K. P. Yap,B. Lamontagne,A. Delage,S. Janz,A. Bogdanov,M. Picard,E. Post,P. Chow-Chong,M. Malloy,D. Roth,P. Marshall,K. Y. Liu,B. Syrett

Journal of Vacuum Science &amp Technology A Vacuum, Surfaces, and Films（2006）

Cited 8|Views9
Key words
Board-Level Optical Interconnects,On-chip Interconnects,Optoelectronic Integration,Integrated Circuits,Optical Gratings
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