The Experimental Model of Micro-Cantilever Switch and Its Optimization Model.
NEMS（2010）
关键词
S-parameters,equivalent circuits,microswitches,ADS,Cascade 12000 microwave probe,S-parameters,equivalent circuit,full-contact pull down voltage,micro-cantilever switch,optimization model,voltage 13.7 V,voltage 6.3 V,Young's Module,actuation voltage,beam,equivalent circuit,optimization model
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