Study on Low Voltage Actuated MEMS Rf Capacitive SwitchesFM Guo,ZQ Zhu,YF Long,WM Wang,SZ Zhu,ZS Lai,N Li,GQ Yang,W LuSensors and Actuators A Physical（2003）引用 50|浏览11关键词MEMS,rf switch,actuation voltage,Young's modulus,low lossAI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
