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论文共 53 篇作者统计合作学者相似作者

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A Holistic Approach to Model-Based Stochastic-Aware Computational Lithography
ChangAn Wang,Yongfa Fan,Mu Feng, Qian Xie, Jazer Wang, Christopher Kaplan,Michael Crouse, Xiaoyang Li,Stephen Hsu, Peigen Cao, Yi-Hsing Peng, Stephen Chang, Jun Ye, Youping Zhang, Bin Cheng, Ken Yang, Leiwu Zheng, Jen-Shiang Wang,Austin Peng, Li-Hao Yeh, Cuiping Zhang,Rafael Howell, Alexander Tan, Yiqiong Zhao, Jun Lang, Xiaolong Zhang
Optical and EUV Nanolithography XXXVI (2023)
引用0浏览0引用
0
0
OPC Accuracy Improvement Through Deep-Learning Based Etch Model
Weina Shi, Liang Zhu, Yuqian Chen,Jiao Huang,Jinze Wang, Qian Xie, Bilun Zhang, Yunfei Xi, Wenhao Pan,Yuanxia Zheng,Yongfa Fan, Jin Cheng, Yu Zhao, Leiwu Zheng
ADVANCED ETCH TECHNOLOGY AND PROCESS INTEGRATION FOR NANOPATTERNING XI (2022)
引用2浏览0引用
2
0
Genetic Algorithm to Speed Up Modeling Turn-Around-time
Jiao Huang,Yongfa Fan, Bin Cheng, Yunbo Guo, Lei Wang,Jinze Wang, Liang Liu, Yanjun Xiao,Mu Feng
2021 International Workshop on Advanced Patterning Solutions (IWAPS)pp.1-4, (2021)
引用0浏览0EIWOS引用
0
0
Stochastic Defect Criticality Prediction Enabled by Physical Stochastic Modeling and Massive Metrology
ChangAn Wang,Peigen Cao,Maxence Delorme,Jen-Yi Wuu, Jiyou Fu,Fuming Wang, Bob Lin,Yiqiong Zhao, Yi-Hsing Peng,Yongfa Fan,Mu Feng, Bin Cheng,Jen-Shiang Wang, Mark Simmoms,Stefan Hunsche,Oliver Patterson, Kevin Pao,Abdalmohsen Elmalk, Kevin Gao, Ruochong Fei, Xuefeng Zeng, Xiaolong Zhang
EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY XII (2021)
引用2浏览0引用
2
0
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作者统计

#Papers: 53

#Citation: 889

H-Index: 20

G-Index: 28

Sociability: 5

Diversity: 1

Activity: 0

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