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个人简介
Dr. George has more than 400 publications in the areas of thin film growth and etching, surface science, and physical chemistry. In addition, he currently has 16 issued U.S. or PCT patents and 12 U.S. or PCT patent applications undergoing review. Dr. George’s research interests are in the areas of surface chemistry, thin film growth and etching and nanostructure engineering. He is directing a research effort focusing on atomic layer deposition (ALD), atomic layer etching (ALE) and molecular layer deposition (MLD). This research is examining new surface chemistry, measuring thin film growth and etching rates, characterizing the properties of films and developing new reactors for ALD, ALE and MLD. Dr. George chaired the first Topical Conference on Atomic Layer Deposition (ALD2001) in May 2001. He has been on the Conference Committees of all subsequent ALD meetings. Dr. George teaches a one-day short course on ALD for the American Vacuum Society (AVS). He also was President of AVS (2014). Dr. George has received a number of awards including the ALD Innovation Award from the AVS International Conference on Atomic Layer Deposition (2013) and an R&D 100 Award for Particle-ALD (2004). Dr. George is a Fellow of the AVS (2000) and the APS (1997). He is also a co-founder of ALD NanoSolutions, Inc., a company that is working to commercialize ALD technology.
研究兴趣
论文共 741 篇作者统计合作学者相似作者
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Samantha M. Rau,Rebecca J. Hirsch,Marcel Junige,Andrew S. Cavanagh, Antonio L. P. Rotondaro, Hanna Paddubrouskaya, Kate H. Abel,Steven M. George
JOURNAL OF PHYSICAL CHEMISTRY Cno. 3 (2025): 1666-1677
CHEMISTRY OF MATERIALSno. 3 (2024): 1449-1458
CHEMISTRY OF MATERIALSno. 14 (2024): 6950-6960
CHEMISTRY OF MATERIALSno. 10 (2024): 5149-5159
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY Ano. 5 (2024)
CHEMISTRY OF MATERIALSno. 3 (2024): 1362-1374
Chemistry of Materialsno. 15 (2024): 7151-7161
APPLIED SURFACE SCIENCE (2023)
CHEMISTRY OF MATERIALSno. 17 (2023): 6671-6681
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作者统计
#Papers: 741
#Citation: 48935
H-Index: 110
G-Index: 195
Sociability: 7
Diversity: 3
Activity: 32
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