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Bio
Patrice Gergaud is a CEA International Expert in X-ray characterization in micro and nanotechnologies, with more than 25 years of experience in this field. After ten years as a Senior Researcher with the French National Center for Scientific Research, in 2006, he joined the nano-characterization platform of the CEA-Minatec Campus, Grenoble and is the Group Leader of the X-Ray Lab. His work is aimed at a better understanding of stresses in microelectronic devices. He has considerable experience in X-ray diffraction and synchrotron radiation. He has authored or coauthored more than 170 articles. His main field of interest is the structure and the mechanical properties of thin films and multilayers.
Research Interests
Papers共 222 篇Author StatisticsCo-AuthorSimilar Experts
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Eva Moule,Nicolas Coudurier,Patrice Gergaud, Julie Loche, Caroline Lacomme,Magali Gregoire,Philippe Rodriguez
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING (2025)
Journal of Applied Physicsno. 10 (2024)
Timothee Choisnet, Abdelali Hammouti, Vincent Gagneur,Jerome Reche,Guido Rademaker,Guillaume Freychet, Guillaume Jullien,Julien Ducote,Patrice Gergaud,Delphine Le Cunff
JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3no. 1 (2024)
Stéphanie Huet,Sylvain Guerber,Emmanuel Rolland,Bertrand Szelag, Guillaume Gelineau,Alexandre Moulin,Vladimir S. Prudkovskiy, Nicolas Troutot,Christophe Licitra,Patrice Gergaud,Sophie Barbet, Mathieu Delcroix, Simon Caridroit, Vincent Amalbert,Carlos Alonso-Ramos,Daniele Melati,Samson Edmond,Laurent Vivien,Karine Mony,Gérard Lapertot,Julie Widiez
Materials Science Forum (2024): 67-76
Microelectronic Engineering (2024): 112210-112210
Diffusion and defect data, solid state data Part B, Solid state phenomena/Solid state phenomena (2024): 65-70
Advanced Materials Technologies (2024)
JOURNAL OF APPLIED PHYSICSno. 22 (2024)
METROLOGY, INSPECTION, AND PROCESS CONTROL XXXVIII (2024)
Extended Abstracts of the 2024 International Conference on Solid State Devices and Materials (2024)
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Author Statistics
#Papers: 222
#Citation: 2409
H-Index: 25
G-Index: 39
Sociability: 7
Diversity: 3
Activity: 13
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