Christopher N. Anderson - Center for X-ray Optics, Lawrence Berkeley National Laboratory

基本信息

Career Trajectory

Bio

Christopher N. Anderson received his BS degree from the University of California, Davis and his MS degree from the University of Arizona, both in the field of Optical Engineering. He is currently pursuing a PhD at the University of California, Berkeley with research focused on several aspects related to the advancement of EUV lithography. He is also currently exploring novel and innovative applications for coherent and incoherent soft x-ray/EUV radiation in metrology, holography, and imaging.

Research Interests

Papers共 86 篇Author StatisticsCo-AuthorSimilar Experts

By YearBy Citation主题筛选期刊级别筛选合作者筛选合作机构筛选

On the Compatibility of Free-Electron Lasers with EUV Scanners

Christopher N. Anderson

OPTICAL AND EUV NANOLITHOGRAPHY XXXVII（2024）

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Advanced Processes in Metal-Oxide Resists for High-Na EUV Lithography

Advances in Patterning Materials and Processes XLI (2024)

Cited2Views0Bibtex

Advanced Development Methods for High-Na EUV Lithography

ADVANCES IN PATTERNING MATERIALS AND PROCESSES XL (2023)

Cited3Views0Bibtex

Mechanisms of Reduced Interspecific Interference Between Territorial Species

Shawn McEachin,Jonathan P. Drury,Christopher N. Anderson,Gregory F. Grether

BEHAVIORAL ECOLOGY（2022）

Cited10Views0Bibtex

Berkeley MET5 Enters Mature Phase of Research

Christopher N. Anderson

International Conference on Extreme Ultraviolet Lithography 2022 (2022)

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The Trade-off Between Local Critical Dimension Uniformity and Sensitivity for Contact Hole High-Na Printing in Chemically Amplified Resists

Chawon Koh, Jinkyu Han, Jinmo Kim,Cheolhong Park, Eunju Kim,Tsunehiro Nishi,Chris Anderson,Patrick Naulleau

INTERNATIONAL CONFERENCE ON EXTREME ULTRAVIOLET LITHOGRAPHY 2022（2022）

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EUV Dark Field Lithography: Extreme Resolution by Blocking 0th Order

Timothy A. Brunner, Jara G. SantaClara,Gerardo Bottiglieri,Christopher N. Anderson,Patrick Naulleau

EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY XII (2021)

Cited4Views0Bibtex

Transformer VAE: A Hierarchical Model for Structure-Aware and Interpretable Music Representation Learning

Junyan Jiang,Gus G. Xia,Dave B. Carlton,Chris N. Anderson,Ryan H. Miyakawa

IEEE Conference Proceedings（2020）

Cited126Views0EIWOSBibtex

126

How We Are Making the 0.5-NA Berkeley Mirco-Field Exposure Tool Stable and Productive

Chris Anderson,Arnaud Allezy,Weilun Chao, Lucas Conley,Carl Cork, Will Cork,Rene Delano,Jason DePonte,Michael Dickinson,Geoff Gaines,Jeff Gamsby,Eric Gullikson,Gideon Jones,Lauren McQuade,Ryan Miyakawa,Patrick Naulleau,Seno Rekawa,Farhad Salmassi, Brandon Vollmer, Daniel Zehma, Wenhua Zhua

EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY XI (2020)

Cited3Views0Bibtex

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