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Papers共 16 篇Author StatisticsCo-AuthorSimilar Experts

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期刊级别
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Development of a Standalone Zoneplate Based EUV Mask Defect Review Tool
Chami Perera, Gi Sung Yoon, Ryan Carlson, Baorui Yang, Mike Hermes,Dave Houser, Alexander Khodarev, Chuck Murray, Travis Grodt,Arnaud Allézy,Weilun Chao,Farhad Salmassi,Eric Gullikson,Patrick Naulleau
Optical and EUV Nanolithography XXXV (2022)
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Author Statistics

#Papers: 16

#Citation: 187

H-Index: 8

G-Index: 12

Sociability: 4

Diversity: 1

Activity: 1

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