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Papers共 136 篇Author StatisticsCo-AuthorSimilar Experts

By YearBy Citation主题筛选期刊级别筛选合作者筛选合作机构筛选
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Sputter Processing
Andrew H. Simon
Handbook of Thin Film Depositionpp.93-140, (2025)
Cited45Views0Bibtex
45
0
Evaluation of Different Metal Preclean Conditions for MOL for 2nm and Beyond
Samuel Munnangi,Andrew Simon,Oscar Van der Straten, Rishi Krishnan,Shahab Siddiqui, Matthew Shoudy
2024 35TH ANNUAL SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE, ASMC (2024)
Cited0Views0Bibtex
0
0
Evaluation of different metal preclean conditions for MOL for 2nm and beyond: Topic/category: AEPM : Advanced Equipment Processes and Materials
Samuel Munnangi,Andrew Simon,Oscar Van der Straten, Rishi Krishnan,Shahab Siddiqui, Matthew Shoudy
2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)pp.01-04, (2024)
Cited0Views0EIWOSBibtex
0
0
Optimization of Area Selective Barrier on Different Metal Interconnects
Linda Wangoh,Andrew Simon, Matthew Shoudy
2024 35TH ANNUAL SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE, ASMC (2024)
Cited0Views0EIWOSBibtex
0
0
Evaluation of Different Metal Preclean Conditions for MOL for 2nm and Beyond: Topic/category: AEPM : Advanced Equipment Processes and Materials
Samuel Munnangi,Andrew Simon,Oscar Van der Straten, Rishi Krishnan,Shahab Siddiqui, Matthew Shoudy
2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (2024)
Cited0Views0Bibtex
0
0
Interconnect Processing: Integration, Dielectrics, Metals
Shyng-Tsong Chen,Nicholas A. Lanzillo,Son Van Nguyen,Takeshi Nogami,Andrew H. Simon
Springer Handbook of Semiconductor Devices Springer Handbookspp.169-218, (2022)
Cited1Views0Bibtex
1
0
Impact of Nanosecond Laser Anneal on PVD Ru Films
D. Sil,Y. Sulehria,O. Gluschenkov,T. Nogami, R. Cornell,A. Simon, J. Li,J. Demarest,B. Haran,C. Lavoie,J. Jordan-Sweet,V Stanic, J. Liu,K. Huet,F. Mazzamuto
2021 IEEE International Interconnect Technology Conference (IITC) (2021)
Cited4Views0EIWOSBibtex
4
0
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Author Statistics

#Papers: 136

#Citation: 3867

H-Index: 30

G-Index: 54

Sociability: 7

Diversity: 1

Activity: 0

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